A Comprehensive Overview of Semi-Conductor Cleanroom Equipment: Air Shower, Airtech Filter

The semiconductor industry demands an ultra-clean and controlled environment to ensure the quality and performance of its sensitive components. Cleanrooms, the cornerstone of this industry, rely on advanced technologies to maintain precise contamination control. The following article delves into some essential cleanroom equipment used in semiconductor manufacturing, focusing on their functionalities and importance.

Air Shower

An air shower is a vital component at the entrance of a cleanroom, designed to eliminate dust and particulate matter from the garments of workers. Acting as an airlock between the cleanroom and gowning area, it prevents contaminants from entering the clean zone. AIRTECH's Pulse Jet Air Shower introduces a patented technology that improves particle removal efficiency by an average of 10% compared to conventional air showers. By using a pulsating air stream, the system shakes garments to dislodge surface particles, which are then filtered through HEPA filters before being recirculated. With features like steel construction, HEPA filters, and programmable logic control, the Pulse Jet Air Shower provides a robust solution for semiconductor cleanrooms.

Airtech Filter

Airtech HEPA filters are engineered to meet international standards, ensuring cleanroom environments maintain the highest levels of air purity. Manufactured in a cleanroom setting, these filters offer predictable performance and ensure the removal of particles as small as 0.3 microns. Whether used in air showers, fan filter units, or clean benches, Airtech HEPA filters play an integral role in preserving the cleanliness required in semiconductor manufacturing.

Clean Bench

Clean benches from AIRTECH are an effective solution for maintaining a clean zone around critical work areas. Available in a variety of models, including table top, console, and SS-MAC, these benches ensure horizontal or vertical laminar airflow, keeping the working area free from contaminants. Commonly used in semiconductor, pharmaceutical, and microelectronic industries, AIRTECH’s clean benches are available in different classifications to suit the stringent cleanliness levels required by these industries.

Fan Filter Unit (FFU)

AIRTECH’s Fan Filter Unit (FFU) is a compact and efficient air filtration system, essential for ensuring cleanroom environments meet the necessary cleanliness standards. Built with high-efficiency HEPA or ULPA filters, these units are designed for energy efficiency, reduced noise levels, and long service life. FFUs are ideal for a wide range of applications in cleanrooms, including front-end and back-end semiconductor manufacturing, biological areas, and sterile environments.

Cleanroom Teardrop Lighting

Lighting in cleanrooms must adhere to specific standards to ensure the environment remains contaminant-free while providing optimal visibility. Airtech’s cleanroom teardrop lighting systems are specially designed for installation in cleanroom ceilings and provide adjustable illumination that meets the demands of the semiconductor industry. These lighting systems are compact, can be surface-mounted, and provide ready-to-plug electrical connections, ensuring ease of installation and use in cleanroom environments.

Pass Box

Pass boxes serve as a buffer zone between cleanrooms and adjoining areas, facilitating the transfer of materials without disturbing airflow or air pressure. These boxes prevent cross-contamination by employing an interlocking system that ensures only one door is open at a time. AIRTECH’s auto pass box systems come equipped with HEPA filters, double sliding doors, and fan units to facilitate the smooth transfer of goods into cleanrooms. This setup not only preserves the cleanliness of the environment but also reduces the need for personnel movement, minimizing the risk of contamination.

SS-MAC

SS-MAC fan filter units provide flexible and reliable air filtration for critical cleanroom areas. These units can be mounted horizontally, vertically, or even upside down, offering a customizable solution for cleanroom environments. Each SS-MAC unit comes with either HEPA or ULPA filters, ensuring the removal of 99.99% to 99.999% of particulates as small as 0.12 microns. They can be used in various configurations, including clean booths, buffer booths, and conveyor hoods, providing clean air wherever needed.

Surface Particle Removal Device

Surface particle removal devices are crucial for removing contaminants from equipment or materials entering a cleanroom. AIRTECH’s brush particle remover uses a nylon brush to eliminate dust from hard surfaces, while its negative pressure design prevents particle dispersion. Additionally, the air knife particle remover uses high-speed jets to blow particles off surfaces, ensuring that no contaminants enter the cleanroom environment. These devices maintain the integrity of cleanrooms by ensuring all surfaces are particle-free before entry.

Air Curtain

Air curtains are installed at cleanroom entrances to prevent airborne contaminants and insects from entering. AIRTECH’s air curtain features a patented unbalanced airflow design that creates a barrier at doorways, keeping contaminants out while allowing personnel to move freely. The system is customizable to match door dimensions and can be integrated with high-speed shutters to enhance its effectiveness. These air curtains are essential for maintaining the cleanliness and sterility of semiconductor cleanrooms.

CHEMI-MAC

CHEMI-MAC is a specialized air filtration unit equipped with a HEPA filter and a chemical filter to remove gaseous pollutants in cleanroom environments. With ultra-high-performance PTFE filters that collect more than 99.9995% of 0.1-micron particles, CHEMI-MAC is ideal for semiconductor manufacturing, where maintaining a pristine atmosphere is critical. It features a variable speed control for adjusting airflow and a time counter for tracking usage, ensuring efficient and reliable operation.

Conclusion

The semiconductor industry relies on an array of advanced cleanroom technologies to maintain its strict contamination control standards. From air showers and clean benches to surface particle removal devices and air curtains, each component plays a critical role in preserving the integrity of cleanroom environments. AIRTECH’s innovative solutions, such as the Pulse Jet Air Shower, SS-MAC units, and CHEMI-MAC filtration systems, ensure that semiconductor manufacturers can maintain the cleanliness and control needed to produce high-quality products.

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